cleanroom Actuator
The highly sealed structure of GLCH series achieves the dust emission prevention and improvement of the suction efficiency to establish both a high cleanliness degree and high performance. Industries like semiconductor manufacturing typically requires a higher cleanliness level than medical device manufacturing due to the extremely dust-sensitive nature of delicate silicon wafers.
Many of today’s cleanroom actuators employ ball screws, while other designs use belt drives or rack-and-pinion arrangements. Actuators designed for cleanroom environments are typically connected to vacuum systems in order to remove any particles generated during motion.
In the vast majority of cleanroom applications involving actuators, positioning repeatability to 50 μm is acceptable.
Features
- Sealing design can prevent dirt and foreign objects from penetrating inside.
- Equipped with an air fitting device, which can keep the internal component clean.
- Clean type can support cleanroom grade class 10(examined by SGS) widely applied in semi-conductor industry and food supply chain.
- Effectively minimize the pollution of the actuator and working environment.
Applications
Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry
GLCH5 series
GLCH5 series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 2 | 6 | 12 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 120 | 300 | 720 | ||
| Maximum Payload | Horizontal | kg | 30 | 25 | 12 | |
| Vertical | kg | 10 | 6 | 3 | ||
| Rated Thrust | N | 854 | 285 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.12 | 0.37 | 0.73 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2265 | 2537 | 1740 | |
| Basic Static Load rating Coa | N | 4839 | 4569 | 3052 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 1414 | |||
| Static Horizontal | N | 13587 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5361 | |||
| Static Load Rating Car | N | 2882 | ||||
| Parts | AC Servo Moter Output | W | 100 | |||
| Ball Screw Ø | mm | C7Ø10 | ||||
| Coupling | mm | 7×8 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||
GLCH5D series
GLCH5D series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 2 | 6 | 12 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 120 | 300 | 720 | ||
| Maximum Payload | Horizontal | kg | 30 | 25 | 12 | |
| Vertical | kg | 10 | 6 | 3 | ||
| Rated Thrust | N | 854 | 285 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.12 | 0.37 | 0.73 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 2265 | 2537 | 1740 | |
| Basic Static Load rating Coa | N | 4839 | 4569 | 3052 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 1414 | |||
| Static Horizontal | N | 13587 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 5381 | |||
| Static Load Rating Car | N | 2880 | ||||
| Parts | AC Servo Moter Output | W | 100 | |||
| Ball Screw Ø | mm | C7Ø10 | ||||
| Coupling | mm | 7×8 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||
GLCH8 series
GLCH8 series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 6 | 12 | 24 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 360 | 720 | 1440 | ||
| Maximum Payload | Horizontal | kg | 80 | 30 | 6 | |
| Vertical | kg | 10 | 5 | 3 | ||
| Rated Thrust | N | 569 | 284 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.37 | 0.73 | 1.47 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 7733 | 6041 | 6654 | |
| Basic Static Load rating Coa | N | 14200 | 10786 | 12182 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 4007 | |||
| Static Horizontal | N | 34189 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | |||
| Static Load Rating Car | N | 5060 | ||||
| Parts | AC Servo Moter Output | W | 200 | |||
| Ball Screw Ø | mm | C7Ø14 /Ø11 | ||||
| Coupling | mm | 10×14 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||
GLCH8D series
GLCH8D series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 6 | 12 | 24 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 360 | 720 | 1440 | ||
| Maximum Payload | Horizontal | kg | 80 | 60 | 6 | |
| Vertical | kg | 10 | 5 | 3 | ||
| Rated Thrust | N | 569 | 284 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.37 | 0.73 | 1.47 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 7733 | 6041 | 6654 | |
| Basic Static Load rating Coa | N | 14200 | 10786 | 12182 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 4007 | |||
| Static Horizontal | N | 34189 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | |||
| Static Load Rating Car | N | 5060 | ||||
| Parts | AC Servo Moter Output | W | 200 | |||
| Ball Screw Ø | mm | C7Ø14 /Ø11 | ||||
| Coupling | mm | 10×14 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||