The Toyo GCH Series actuators are known for their precision, reliability, and performance in various industrial applications, including semiconductor manufacturing. Cleanroom actuators must comply with ISO standards, particularly ISO 14644-1, which outlines the maximum permissible particle count in the air of a cleanroom environment. Actuators used in semiconductor cleanrooms are typically classified in accordance with ISO standards to ensure they meet the required cleanliness levels.
Toyo GCH Series actuators are engineered to provide smooth and accurate motion control, making them well-suited for tasks that require precise positioning and control, such as wafer handling, equipment positioning, and other critical processes within semiconductor cleanrooms.
Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry
Performance | Repeatability | mm | +/-0.005 | |||
---|---|---|---|---|---|---|
Lead | mm | 2 | 6 | 12 | ||
Maximum Speed | mm/s | 100 | 300 | 600 | ||
Maximum Payload | Horizontal | kg | 25 | 20 | 12 | |
Vertical | kg | 8 | 5 | 2 | ||
Rated Thrust | N | 424 | 141 | 71 | ||
Stroke | N | 50-800mm/50 intervals (50 Increments) | ||||
Parts | AC Servo Moter Output | W | 50 | |||
Ball Screw Ø | mm | C7Ø10 | ||||
Coupling | mm | 7×8 | ||||
Home Sensor | Outside | T74N2(NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
50 | 220 | HG-KR053 | MR-J4-10A |
With Brake (Vertical type) |
50 | 220 | HG-KR053B | MR-J4-10A | ||
Panasonic | P | No Brake (Horizontal Type) |
50 | 220 | MSMD5A2G1U | MADHT1505 |
With Brake (Vertical type) |
50 | 220 | MSMD5A2G1V | MADHT1505 | ||
Delta | T | No Brake (Horizontal Type) |
50 | 220 | ECMA-C10401ES | ASD-B20121-B |
With Brake (Vertical type) |
50 | 220 | ECMA-C1040FES | ASD-B20121-B |
Performance | Repeatability | mm | +/-0.005 | |||
---|---|---|---|---|---|---|
Lead | mm | 2 | 6 | 12 | ||
Maximum Speed | rpm | 100 | 300 | 600 | ||
Maximum Payload | Horizontal | kg | 25 | 20 | 12 | |
Vertical | kg | 8 | 8 | 3.5 | ||
Rated Thrust | N | 424 | 141 | 71 | ||
Stroke | N | 50-800mm/50 intervals (50 Increments) | ||||
Parts | AC Servo Moter Output | W | 100 | |||
Ball Screw Ø | mm | C7Ø10 | ||||
Coupling | mm | 7×8 | ||||
Home Sensor | Outside | T74N2 (NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
100 | 220 | HG-KR13 | MR-J4-10A |
With Brake (Vertical type) |
100 | 220 | HG-KR13B | MR-J4-10A | ||
Panasonic | P | No Brake (Horizontal Type) |
100 | 220 | MSMD012G1U | MADHT1505 |
With Brake (Vertical type) |
100 | 220 | MSMD012G1V | MADHT1505 | ||
Delta | T | No Brake (Horizontal Type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
With Brake (Vertical type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
Performance | Repeatability | mm | +/-0.005 | ||||
---|---|---|---|---|---|---|---|
Lead | mm | 2 | 5 | 10 | 20 | ||
Maximum Speed | mm/s | 100 | 250 | 500 | 1000 | ||
Maximum Payload | Horizontal | kg | 30 | 30 | 15 | 10 | |
Vertical | kg | 10 | 10 | 5 | 2.5 | ||
Rated Thrust | N | 854 | 341 | 170 | 85 | ||
Stroke | N | 50-800mm/50 intervals (50 Increments) | |||||
Parts | AC Servo Moter Output | W | 100 | ||||
Ball Screw Ø | mm | C7Ø12 | |||||
Coupling | mm | 7×8 | |||||
Home Sensor | Outside | T74N2(NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
100 | 220 | HG-KR13 | MR-J4-10A |
With Brake (Vertical type) |
100 | 220 | HG-KR13B | MR-J4-10A | ||
Panasonic | P | No Brake (Horizontal Type) |
100 | 220 | MSMD012G1U | MADHT1505 |
With Brake (Vertical type) |
100 | 220 | MSMD012G1V | MADHT1505 | ||
Delta | T | No Brake (Horizontal Type) |
100 | 220 | ECMA-C20401ES | ASD-B20121-B |
With Brake (Vertical type) |
100 | 220 | ECMA-C20401FS | ASD-B20121-B |
Performance | Repeatability | mm | +/-0.005 | |||
---|---|---|---|---|---|---|
Lead | mm | 5 | 10 | 20 | ||
Maximum Speed | mm/s | 250 | 500 | 1000 | ||
Maximum Payload | Horizontal | kg | 50 | 30 | 18 | |
Vertical | kg | 15 | 8 | 3 | ||
Rated Thrust | N | 683 | 341 | 174 | ||
Stroke | N | 50-1100mm/50 intervals (50 Increments) | ||||
Parts | AC Servo Moter Output | W | 200 | |||
Ball Screw Ø | mm | C7Ø16 | ||||
Coupling | mm | 10×14x11 | ||||
Home Sensor | Outside | T74N2(NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
200 | 220 | HG-KR23 | MR-J4-20A |
With Brake (Vertical type) |
200 | 220 | HG-KR23B | MR-J4-20A | ||
Panasonic | P | No Brake (Horizontal Type) |
200 | 220 | MHMD022G1U | MADHT1507 |
With Brake (Vertical type) |
200 | 220 | MHMD022G1V | MADHT1507 | ||
Delta | T | No Brake (Horizontal Type) |
200 | 220 | ECMA-C20602ES | ASD-B20221-B |
With Brake (Vertical type) |
200 | 220 | ECMA-C20602FS | ASD-B20221-B |
Performance | Repeatability | mm | +/-0.005 | |||
---|---|---|---|---|---|---|
Lead | mm | 5 | 10 | 20 | ||
Maximum Speed | mm/s | 250 | 500 | 1000 | ||
Maximum Payload | Horizontal | kg | 50 | 30 | 18 | |
Vertical | kg | 15 | 8 | 3 | ||
Rated Thrust | N | 683 | 341 | 174 | ||
Stroke | N | 50-1100mm/50 intervals (50 Increments) | ||||
Parts | AC Servo Moter Output | W | 400 | |||
Ball Screw Ø | mm | C7Ø16 | ||||
Coupling | mm | 10×14 | ||||
Home Sensor | Outside | T74N2(NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MHMD042G1U | MbDHT2510 |
With Brake (Vertical type) |
400 | 220 | MHMD042G1V | MBDHT2510 | ||
Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |
Performance | Repeatability | mm | +/-0.005 | ||||
---|---|---|---|---|---|---|---|
Lead | mm | 5 | 10 | 20 | 32 | ||
Maximum Speed | mm/s | 250 | 500 | 1000 | 1600 | ||
Maximum Payload | Horizontal | kg | 110 | 88 | 40 | 30 | |
Vertical | kg | 32 | 22 | 10 | 8 | ||
Rated Thrust | N | 1388 | 694 | 347 | 218 | ||
Stroke | N | 50-1250mm/50 intervals (50 Increments) | |||||
Parts | AC Servo Moter Output | W | 400 | ||||
Ball Screw Ø | mm | C7Ø16 | |||||
Coupling | mm | 10×14 | |||||
Home Sensor | Outside | T74N2(NPN) |
Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
---|---|---|---|---|---|---|
Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MSMD042G1U | MBDHT2510 |
With Brake (Vertical type) |
400 | 220 | MSMD042G1V | MADHT2510 | ||
Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
With Brake (Vertical type) |
400 | 220 | ECMA-C20604FS | ASD-B20421-B |