cleanroom Actuator
cleanroom belt-type electric actuators i.e. GLCB series are specialized devices designed to be used in cleanroom environments where cleanliness and particle control are critical. These actuators utilize a belt-driven mechanism to convert electrical energy into linear motion, offering precise positioning and control while minimizing the risk of contamination.
GLCB series actuators typically feature an enclosed design to prevent contamination from external sources. Sealed enclosures help protect the internal components from dust, debris, and other contaminants, ensuring reliable operation in cleanroom settings.
Features
- Typically connected to vacuum systems in order to remove any particles generated during motion.
- Provide specialized ports for quick connecting. This is for simple hookup to vacuum tubing.
- Effectively minimize the pollution of the actuator and working environment.
- Operation life is 5000 km when the product is using under specified conditions.
Applications
Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry
GLCB5 series
GLCB5 series specification
| Performance | Repeatability | mm | +/-0.04 | |
|---|---|---|---|---|
| Lead | mm | 32 | ||
| Maximum Rotating Speed | rpm | 3600 | ||
| Maximum Linear Speed | mm/s | 1920 | ||
| Maximum Payload | Horizontal | kg | 5 | |
| Vertical | kg | NA | ||
| Rated Thrust | N | 53 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||
| Maximum Acceleration | G | 0.65 | ||
| Belt | Tis | N | 28 | |
| Timax | N | 31 | ||
| Part | AC Servo Moter Output | W | 100 | |
| Skin Tightness | mm | 9 | ||
| Coupling | Outside | T64N2 (NPN+2 meters wire) | ||
GLCB8 series
GLCB8 series specification
| Performance | Repeatability | mm | +/-0.04 | |
|---|---|---|---|---|
| Lead | mm | 60 | ||
| Maximum Rotating Speed | rpm | 3000 | ||
| Maximum Linear Speed | mm/s | 3000 | ||
| Maximum Payload | Horizontal | kg | 8 | |
| Vertical | kg | NA | ||
| Rated Thrust | N | 116 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||
| Maximum Acceleration | G | 1.22 | ||
| Belt | Tis | N | 37 | |
| Timax | N | 42 | ||
| Part | AC Servo Moter Output | W | 400 | |
| Skin Tightness | mm | 8 | ||
| Coupling | Outside | T64N2 (NPN+2 meters wire) | ||
GLCH8 series
GLCH8 series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 6 | 12 | 24 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 360 | 720 | 1440 | ||
| Maximum Payload | Horizontal | kg | 80 | 30 | 6 | |
| Vertical | kg | 10 | 5 | 3 | ||
| Rated Thrust | N | 569 | 284 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.37 | 0.73 | 1.47 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 7733 | 6041 | 6654 | |
| Basic Static Load rating Coa | N | 14200 | 10786 | 12182 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 4007 | |||
| Static Horizontal | N | 34189 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | |||
| Static Load Rating Car | N | 5060 | ||||
| Parts | AC Servo Moter Output | W | 200 | |||
| Ball Screw Ø | mm | C7Ø14 /Ø11 | ||||
| Coupling | mm | 10×14 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||
GLCH8D series
GLCH8D series specification
| Performance | Repeatability | mm | +/-0.005 | |||
|---|---|---|---|---|---|---|
| Lead | mm | 6 | 12 | 24 | ||
| Maximum Rotating Speed | rpm | 3600 | 3600 | 3600 | ||
| Maximum Linear Speed | mm/s | 360 | 720 | 1440 | ||
| Maximum Payload | Horizontal | kg | 80 | 60 | 6 | |
| Vertical | kg | 10 | 5 | 3 | ||
| Rated Thrust | N | 569 | 284 | 142 | ||
| Stroke | N | 50-3000mm/50 intervals (50 Increments) | ||||
| Maximum Acceleration | G | 0.37 | 0.73 | 1.47 | ||
| Ball Screw | Basic Dynamic Load rating Ca | N | 7733 | 6041 | 6654 | |
| Basic Static Load rating Coa | N | 14200 | 10786 | 12182 | ||
| Linear Guide | Dynamic Horizontal (100 Km) | N | 4007 | |||
| Static Horizontal | N | 34189 | ||||
| Fixed Bearing | Basic Dynamic Load rating | N | 8447 | |||
| Static Load Rating Car | N | 5060 | ||||
| Parts | AC Servo Moter Output | W | 200 | |||
| Ball Screw Ø | mm | C7Ø14 /Ø11 | ||||
| Coupling | mm | 10×14 | ||||
| Home Sensor | Outside | T64N2 (NPN+2 meters wire) | ||||