cleanroom Actuator
In cleanroom environments, electric actuators play a crucial role in ensuring precision, quality, and cleanliness. We offer electric actuators that are suitable for cleanroom applications, with high demands on speed, payload, and stroke paths. Maximum payload of these electric actuators can be 150 Kg, have stroke paths of up to 1,500 mm. They are designed to minimize particle emissions and ingress of particles in cleanroom applications, adhering to stringent cleanliness requirements. Furthermore, the products are tested and classified in accordance with ISO standards, making them suitable for use in cleanrooms.
Features
- Cleanroom compatibility: These actuators are designed to minimize particle emissions and ingress, meeting the stringent cleanliness requirements of cleanroom environments.
- Precision and repeatability: Electric actuators offer high precision and repeatability, ensuring accuracy in positioning and movement within the cleanroom.
- High speed and acceleration: These actuators can achieve high speeds of up to 1,600 mm/s, allowing for efficient and rapid movement within the cleanroom environment.
- Stroke paths: Electric actuators can provide stroke paths of up to 1,500 mm, accommodating a wide range of motion requirements in cleanroom applications.
- Compliance with standards: The electric actuators are tested and classified in accordance with ISO standards, ensuring their suitability for use in cleanrooms and other controlled environments.
Applications
Semi-conductor manufacturing, Wafer piling, Wafer surface cleaning device, Food processing industry, Optics and Photonics, Medical Device Manufacturing, Pharmaceutical and Biotechnology
ECH14-200W series
ECH14-200W series specification
| Performance | Repeatability | mm | +/-0.005 | ||||
|---|---|---|---|---|---|---|---|
| Ball Screw Lead | mm | 5 | 10 | 20 | 32 | ||
| Maximum Speed | (mm/s) | 250 | 500 | 1000 | 1600 | ||
| Maximum Payload | Horizontal | kg | 95 | 75 | 35 | 15 | |
| Vertical | kg | 27 | 18 | 7 | - | ||
| Rated Thrust | N | 683 | 341 | 174 | 107 | ||
| Stroke Pitch | mm | 50-1050mm/50 intervals (50 Increments) | |||||
| Parts | AC Servo Moter Output | W | 200 | ||||
| Ball Screw Ø | mm | C7Ø16 | |||||
| High Rigidity Linear Guide | mm | W15XH12.5 | |||||
| Coupling | mm | 10X14X11 | |||||
| Home Sensor | Outside | EE-SX672(NPN) | |||||
| Built-in | EE-SX67(NPN) | ||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
200 | 220 | HG-KR13 | MR-J4-20A |
| With Brake (Vertical type) |
200 | 220 | HG-KR13B | MR-J4-20A | ||
| Panasonic | P | No Brake (Horizontal Type) |
200 | 220 | MSMD012G1U | MADHT1507 |
| With Brake (Vertical type) |
200 | 220 | MSMD012G1V | MADHT1507 | ||
| Delta | T | No Brake (Horizontal Type) |
200 | 220 | ECMA-C20401ES | ASD-B20221-B |
| With Brake (Vertical type) |
200 | 220 | ECMA-C20401ES | ASD-B20221-B |
ECH14-400W series
ECH14-400W series specification
| Performance | Repeatability | mm | +/-0.005 | ||||
|---|---|---|---|---|---|---|---|
| Ball Screw Lead | mm | 5 | 10 | 20 | 32 | ||
| Maximum Speed | mm/s | 250 | 500 | 1000 | 1600 | ||
| Maximum Payload | Horizontal | kg | 110 | 88 | 40 | 30 | |
| Vertical | kg | 33 | 22 | 10 | 8 | ||
| Rated Thrust | N | 1388 | 694 | 347 | 217 | ||
| Stroke | N | 50-1050mm/50 intervals (50 Increments) | |||||
| Parts | AC Servo Moter Output | W | 400 | ||||
| Ball Screw Ø | mm | C7Ø16 | |||||
| High Rigidity Linear Guide | mm | W15XH12.5 | |||||
| Coupling | mm | 10×14 | |||||
| Home Sensor | Outside | EE-SX672(NPN) | |||||
| Built-in | EE-SX674(NPN) | ||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MHMD042G1U | MADHT2510 |
| With Brake (Vertical type) |
400 | 220 | MHMD042G1V | MBDHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
ECH17-400W series
ECH17-400W series specification
| Performance | Repeatability | mm | +/-0.005 | ||||
|---|---|---|---|---|---|---|---|
| Lead | mm | 5 | 10 | 20 | 40 | ||
| Maximum Speed | mm/s | 250 | 500 | 1000 | 2000 | ||
| Maximum Payload | Horizontal | kg | 120 | 110 | 75 | 22 | |
| Vertical | kg | 40 | 30 | 14 | 7 | ||
| Rated Thrust | N | 1388 | 694 | 347 | 174 | ||
| Stroke | mm | 50-1250mm/50 intervals (50 Increments) | |||||
| Parts | AC Servo Moter Output | W | 400 | ||||
| Ball Screw Ø | mm | C7Ø20 | |||||
| High Rigidity Linear Guide | mm | W20XH15 | |||||
| Coupling | mm | 12×14 | |||||
| Home Sensor | Outside | EE-SX672(NPN) | |||||
| Built-in | EE-SX674(NPN) | ||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
400 | 220 | HG-KR43 | MR-J4-40A |
| With Brake (Vertical type) |
400 | 220 | HG-KR43B | MR-J4-40A | ||
| Panasonic | P | No Brake (Horizontal Type) |
400 | 220 | MHMD042G1U | MBDHT2510 |
| With Brake (Vertical type) |
400 | 220 | MHMD042G1V | MADHT2510 | ||
| Delta | T | No Brake (Horizontal Type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
| With Brake (Vertical type) |
400 | 220 | ECMA-C20604ES | ASD-B20421-B |
ECH17-750W series
ECH17-750W series specification
| Performance | Repeatability | mm | +/-0.005 | ||||
|---|---|---|---|---|---|---|---|
| Lead | mm | 5 | 10 | 20 | 40 | ||
| Maximum Speed | mm/s | 250 | 500 | 1000 | 2000 | ||
| Maximum Payload | Horizontal | kg | 120 | 120 | 83 | 43 | |
| Vertical | kg | 50 | 40 | 25 | 12 | ||
| Rated Thrust | N | 2563 | 1281 | 640 | 320 | ||
| Stroke | mm | 50-1250mm/50 intervals (50 Increments) | |||||
| Parts | AC Servo Moter Output | W | 750 | ||||
| Ball Screw Ø | mm | C7Ø20 | |||||
| High Rigidity Linear Guide | mm | W20XH15 | |||||
| Coupling | mm | 12×19 | |||||
| Home Sensor | Outside | EE-SX672(NPN) | |||||
| Built-in | EE-SX674(NPN) | ||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
750 | 220 | HG-KR73 | MR-J4-70A |
| With Brake (Vertical type) |
750 | 220 | HG-KR73B | MR-J4-70A | ||
| Panasonic | P | No Brake (Horizontal Type) |
750 | 220 | MHMD082G1U | MCDHT3520 |
| With Brake (Vertical type) |
750 | 220 | MHMD082G1V | MCDHT3510 | ||
| Delta | T | No Brake (Horizontal Type) |
750 | 220 | ECMA-C20807ES | ASD-B20721-B |
| With Brake (Vertical type) |
750 | 220 | ECMA-C20807FS | ASD-B20721-B |
ECH22-750W series
ECH22-750W series specification
| Performance | Repeatability | mm | +/-0.005 | |||||
|---|---|---|---|---|---|---|---|---|
| Ball Screw Lead | mm | 5 | 10 | 25 | 40 | |||
| Maximum Speed | mm/s | 250 | 500 | 1250 | 2000 | |||
| Maximum Payload | Horizontal | kg | 150 | 150 | 105 | 43 | ||
| Vertical | kg | 55 | 45 | 20 | 12 | |||
| Rated Thrust | N | 2565 | 1281 | 640 | 320 | |||
| Stroke | mm | 50-1500mm/50 intervals (50 Increments) | ||||||
| Parts | AC Servo Moter Output | W | 750 | |||||
| Ball Screw Ø | mm | C7Ø25 | C7Ø20 | |||||
| High Rigidity Linear Guide | mm | W23XH18 | ||||||
| Coupling | mm | 17×19 | 12×19 | |||||
| Home Sensor | Outside | EE-SX672(NPN) | ||||||
| Built-in | EE-SX674(NPN) | |||||||
| Brand | Mark | Brake | Watt | AC-Voltage | Motor Model | Driver Model |
|---|---|---|---|---|---|---|
| Mitsubishi | M | No Brake (Horizontal Type) |
750 | 220 | HG-KR73 | MR-J4-70A |
| With Brake (Vertical type) |
750 | 220 | HG-KR73B | MR-J4-70A | ||
| Panasonic | P | No Brake (Horizontal Type) |
750 | 220 | MHMD082G1U | MCDHT3520 |
| With Brake (Vertical type) |
750 | 220 | MHMD082G1V | MCDHT3520 | ||
| Delta | T | No Brake (Horizontal Type) |
750 | 220 | ECMA-C20807ES | ASD-B20721-B |
| With Brake (Vertical type) |
750 | 220 | ECMA-C20807FS | ASD-B20721-B |