Air Bearing Linear Stage
An air bearing linear stage is a system that uses compressed air to provide a smooth and precise means of movement for semiconductor equipment. It uses a thin stream of compressed air to cushion the equipment as it is lifted or moved, minimizing friction and wear. This type of system is commonly used in semiconductor manufacturing processes, particularly those that require high precision and delicate handling of equipment. It allows for greater control and flexibility in the movement of the equipment, and can also help to reduce downtime and maintenance costs. Suitable for various precision measurement processes, Precise alignment.
Class 1 cleanroom compatible. Stroke is 50mm to 500mm. The encoder can be selected from 1um to 0.05um depending on the application. Straightness and flatness are 0.5um/300mm. Pitching and yawing can be delivered with +/-2 arc sec coils, magnets, and encoders all installed.
Easy to achieve ultra-high six degrees of freedom (linear accuracy, horizontal straightness, vertical. Zero wear, zero maintenance.
Repeat +/-0.2μm/300mm Accuracy
Speed Ripple 100mm/s 0.1% %
Nanoscale Straightness 0.5 % μm/300mm
Degree of Freedom Yaw +/-2 arc sec
Applicable industries
- Semiconductor
- Detection
- Automated precision measurement and laser cutting.
- Ideal for cleanroom and medical applications.
LBT-210 series
LBT-210 series specification
| Model | |||||||||
| Table Size(mm) | |||||||||
| Travel(mm) | |||||||||
| Accuracy(μm) | Calibrated | ||||||||
| Standard | |||||||||
| Repeatability(μm) | |||||||||
| Straightness(μm) | |||||||||
| Flatness(μm) | |||||||||
| Pitch(arc sec) | |||||||||
| Yaw(arc sec) | |||||||||
| Maximum Speed(m/s) | |||||||||
| Maximum Acceleration(m/s2) | |||||||||
| Continuous Force(N) | |||||||||
| Peek Force(N) | |||||||||
| Load Capacity(kg) | |||||||||
| Air Consumption(L/min) | |||||||||
| Operating Air Pressure(MPa) | |||||||||
| Model | |||||||
| Table Size(mm) | |||||||
| Travel(mm) | |||||||
| Accuracy(μm) | Calibrated | ||||||
| Standard | |||||||
| Repeatability(μm) | |||||||
| Straightness(μm) | |||||||
| Flatness(μm) | |||||||
| Pitch(arc sec) | |||||||
| Yaw(arc sec) | |||||||
| Maximum Speed(m/s) | |||||||
| Maximum Acceleration(m/s2) | |||||||
| Continuous Force(N) | |||||||
| Peek Force(N) | |||||||
| Load Capacity(kg) | |||||||
| Air Consumption(L/min) | |||||||
| Operating Air Pressure(MPa) | |||||||
LBT-275 series
LBT-275 series specification
| Model | |||||||||
| Table Size(mm) | |||||||||
| Travel(mm) | |||||||||
| Accuracy(μm) | Calibrated | ||||||||
| Standard | |||||||||
| Repeatability(μm) | |||||||||
| Straightness(μm) | |||||||||
| Flatness(μm) | |||||||||
| Pitch(arc sec) | |||||||||
| Yaw(arc sec) | |||||||||
| Maximum Speed(m/s) | |||||||||
| Maximum Acceleration(m/s2) | |||||||||
| Continuous Force(N) | |||||||||
| Peek Force(N) | |||||||||
| Load Capacity(kg) | |||||||||
| Air Consumption(L/min) | |||||||||
| Operating Air Pressure(MPa) | |||||||||
| Model | |||||||
| Table Size(mm) | |||||||
| Travel(mm) | |||||||
| Accuracy(μm) | Calibrated | ||||||
| Standard | |||||||
| Repeatability(μm) | |||||||
| Straightness(μm) | |||||||
| Flatness(μm) | |||||||
| Pitch(arc sec) | |||||||
| Yaw(arc sec) | |||||||
| Maximum Speed(m/s) | |||||||
| Maximum Acceleration(m/s2) | |||||||
| Continuous Force(N) | |||||||
| Peek Force(N) | |||||||
| Load Capacity(kg) | |||||||
| Air Consumption(L/min) | |||||||
| Operating Air Pressure(MPa) | |||||||