Horizontal Z Axis Stage
The Toyo Horizontal Z Axis Stage is a device used in the semiconductor industry to position and manipulate samples during the production process. It consists of a horizontal platform with a linear bearing allowing precise control of sample movement along the z-axis. This stage is widely used in applications such as plastic substrate processing, solar cell manufacturing, and advanced packaging. It is known for its high accuracy and reliability, making it a popular choice for demanding production environments.
It is equipped with crossed roller bearings to achieve high rigidity and high-precision. And effectively reduce the height of the table. It adopts an innovative wedge-shaped structure, is compact and can achieve high-precision up and down positioning of the lifting worktable.
Repeat : ±0.1 μm
Flatness : 10 μm
Maximum Load : 80 Kg
High : 85 mm
Journey :10 mm
Features
- Compact and precise lifting table
- By installing an optical ruler, full closed-loop control can be achieved.
- No friction, zero wear, zero noise, and no pollution caused by lubricating oil.
- The throttling element is built into high-precision components.
- Excellent motion accuracy (six degrees of freedom).
- Using non-contact air bearings, there is no mechanical contact when moving, and there will be no wear or performance degradation over time.
- It has unlimited service life, no lubricating oil contamination platform, and can meet the cleanroom Class 1 level.
- Higher damping is beneficial to motion stability, granite base stage.
- High speed, high acceleration motion
Applicable industries
- Micro LED
- Semiconductor AOI
- PCB Inspection
- Automated Precision Measurement
ZH20 series
ZH20 series specification
| Model | |
| Guide Type | |
| Maximum Payload(kg) | |
| Effective Stroke(mm) | |
| Maximum Speed(mm/s) | |
| Repeatability(μm) | |
| Flatness(μm) | |
| Motor Type | |
| Material | |
| Module Weight(kg) |
ZH20H series
ZH20H series specification
| Model | |
| Guide Type | |
| Maximum Payload(kg) | |
| Maximum Speed(mm/s) | |
| Effective Stroke(mm) | |
| Repeatability(μm) | |
| Straightness-Front/Back(μm) | |
| Straightness-Left/Right(μm) | |
| Flatness(μm) | |
| Motor Type | |
| Material | |
| Module Weight(kg) |